This document describes a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy, of surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, RSm, in the range of about 0,04 μm to 2,5 μm.
Ceramic
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ISO 19606:2017 Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy
- Document number: ISO 19606:2017
- Publisher: ISO
- Publish year: 2017
- Orgnization: ISO
- Sub Categories: Standards/ Specification/ Regulations
- Document Type: Standard